Metal working – Piezoelectric device making
Reexamination Certificate
2006-09-12
2006-09-12
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S825000, C417S322000
Reexamination Certificate
active
07103949
ABSTRACT:
A method for fabricating a transducer suitable for a fluidic drive for a miniature acoustic-fluidic pump or mixer that includes an acoustic transducer attached to an exterior or interior of a fluidic circuit or reservoir. The transducer converts radio frequency electrical energy into an ultrasonic acoustic wave in a fluid that in turn generates directed fluid motion through the effect of acoustic streaming. The method includes depositing a piezo-electric thin-film onto a platinum coated silicon wafer or substrate with capping electrodes, defining each separate transducer; and dicing said piezoelectric tin-film to provide individual transducers.
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Bell Michael I.
Horwitz James
Kabler Milton N.
Rife Jack C.
Ferrett Sally A.
Karasek John J.
Nguyen Tai Van
The United States of America as represented by the Secretary of
Tugbang A. Dexter
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