Method for fabricating a thin film transistor

Details Method for fabricating a thin film transistor Method for fabricating a thin film transistor

1993-10-22

1995-04-04

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 41, 437909, H01L 21265

Patent

active

054037557

ABSTRACT:
A method for fabricating a thin film transistor using a polysilicon with a double junction structure.
The method includes the steps of:

REFERENCES:
patent: 5120667 (1992-06-01), Tarui et al.
patent: 5214295 (1993-05-01), Manning
patent: 5254488 (1993-10-01), Haller
patent: 5273920 (1993-12-01), Kwansnick et al.

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