Method for fabricating a thin film resistor

Fishing – trapping – and vermin destroying

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

437 47, 437918, 148DIG136, H01L 2170

Patent

active

056839286

ABSTRACT:
A method is provided for the manufacture of precision electronic components such as resistors, inductors, and capacitors on a polymer or ceramic surface. The electronic components can be deposited and trimmed to precise or matched values without having precise depositions of all of the pre-patterned materials. Thin film electronic components are deposited on a surface, parameter values are measured or estimated, a correction offset file is generated, and the components are trimmed using adaptive lithography to a very close tolerance. A computer program can be used to enable the adjustment of electronic components by techniques such as changing the physical length of an inductor coil or resistor lead, or by changing a capacitor plate area.

REFERENCES:
patent: 3781610 (1973-12-01), Bodway
patent: 4020222 (1977-04-01), Kausche et al.
patent: 4087778 (1978-05-01), Merz et al.
patent: 4200970 (1980-05-01), Schonberger
patent: 4418474 (1983-12-01), Barnett
patent: 4783695 (1988-11-01), Eichelberger et al.
patent: 4801469 (1989-01-01), Norwood
patent: 5043295 (1991-08-01), Ruggerio et al.
patent: 5084420 (1992-01-01), Tsai
patent: 5266529 (1993-11-01), Lau et al.
patent: 5323138 (1994-06-01), Oki et al.
patent: 5353498 (1994-10-01), Fillion et al.
patent: 5420063 (1995-05-01), Maghsoudnia et al.
patent: 5468672 (1995-11-01), Rosvold
patent: 5469131 (1995-11-01), Takahashi et al.
patent: 5496762 (1996-03-01), Sandhu et al.
patent: 5547896 (1996-08-01), Linn et al.
U.S. Patent Application Ser. No. 08/349,228 "Thin Film Resistors on Organic Surfaces" by Robert J. Wojnarowski, et al, filed Dec. 5, 1994.
"Response Surface Methodology", by William C. Hunter, Quality Control Handbook, Section 28, pp. 28-1 -28-12.
"Lightly Trimming the Hybrids" by A. Elshabini-Riad, et al, 1993 IEEE, Circuits and Devices, pp. 30-34.
"Electrical Trimming of Ion-Beam-Sputtered Polysilicon Resistors by High Current Pulses" by Soumen Das, et al, IEEE Transactions on Electron Devices, vol. 41, No. 8, Aug. 1994, pp. 1429-1434.
"Improvement of Laser Trimmed Film Resistor Stability By Selection of Optimal Trim Paths" by Jaime Ramfrez-Angulo, et al, IEEE pp. 2188-2191, Apr. 1991.
"A Technology for High Density Mounting Utilizing Polymeric Multilayer Substrate" by M. Takeuchi, et al, IEEE/CHMT 1989 Japan IEMT Symposium, pp. 136-140.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for fabricating a thin film resistor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for fabricating a thin film resistor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for fabricating a thin film resistor will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1832654

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.