Semiconductor device manufacturing: process – Making passive device
Patent
1998-10-23
2000-03-21
Bowers, Charles
Semiconductor device manufacturing: process
Making passive device
336137, H01L 2120
Patent
active
060402261
ABSTRACT:
A method is provided for the manufacture of precision electronic components such as resistors, inductors, and capacitors on a polymer or ceramic surface. The electronic components can be deposited and trimmed to precise or matched values without having precise depositions of all of the pre-patterned materials. Thin film electronic components are deposited on a surface, parameter values are measured or estimated, a correction offset file is generated, and the components are trimmed using adaptive lithography to a very close tolerance. A computer program can be used to enable the adjustment of electronic components by techniques such as changing the physical length of an inductor coil or resistor lead, or by changing a capacitor plate area.
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Balch Ernest Wayne
Douglas Leonard Richard
Downey Evan Taylor
Gdula Michael
Rose James Wilson
Agosti Ann M.
Bowers Charles
Breedlove Jill M.
General Electric Company
Thompson Craig
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