Method for fabricating a tapered optical coupling into a...

Details Method for fabricating a tapered optical coupling into a... Method for fabricating a tapered optical coupling into a...

2006-02-21

2006-02-21

Tsai, H. Jey (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S701000

Reexamination Certificate

active

07001789

ABSTRACT:
A three dimensional adiabatic taper provides a funnel for light to be coupled into high index material. The taper is formed by shadow deposition or sputtering from polysilicon, which can be used to match the refractive index of waveguiding material to which the taper is optically coupled. When designed with the correct shape and adequate smoothness, such tapers form efficient waveguide couplers. Once the light has been coupled through the adiabatic coupler into an index guide on a wafer or chip, an integral design of the transition between the index guide and photonic crystal ensures low loss coupling with a minimum of diffraction and back reflection.

REFERENCES:
patent: 6468823 (2002-10-01), Scherer et al.

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