Metal working – Means to assemble or disassemble – Puller or pusher means – contained force multiplying operator
Patent
1985-09-09
1986-12-16
Goldberg, Howard N.
Metal working
Means to assemble or disassemble
Puller or pusher means, contained force multiplying operator
29157C, 29428, 29557, 29DIG16, 2391021, 23953312, 251 611, 251331, B21D 5300, B21D 3900, F16K 3106, F16K 3142
Patent
active
046285768
ABSTRACT:
A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice. A method is disclosed which method addresses the fabrication of the aforementioned silicon valve, wherein an oxide is grown on the surface of a wafer and the wafer then is etched to define a valve seat pattern. Both a top and a bottom plate are fabricated from wafer material and the profiled wafers are bonded together in a manner which will allow fluid passage therethrough.
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patent: 3921916 (1975-11-01), Bassous
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patent: 4157935 (1979-06-01), Solyst
patent: 4317559 (1982-03-01), Finkbeiner et al.
patent: 4455192 (1984-06-01), Tamai
Bassous, E.; "Fabrication of Novel Three-Dimensional Microstructures by the Anisotropic Etching of (100) and (110) Silicon", Institute of Electrical and Electronics Engineers Transactions on Electron Devices, vol. ed-25, No. 10 (Oct. 1978); pp. 1178-1185.
Giachino Joseph M.
Kress James W.
Abolins Peter
Ford Motor Company
Goldberg Howard N.
Sanborn Robert D.
Wallace R. S.
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