Fishing – trapping – and vermin destroying
Patent
1988-05-27
1989-02-28
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437901, 437919, 437226, 437228, 156647, 2041293, 148DIG12, H01L 2720, H01L 2170
Patent
active
048085499
ABSTRACT:
A silicon substrate having {100} nominal crystalline planes is anisotropically etched to form a pair of V-shaped grooves along the top planar surface and a first plate between the grooves. The top planar surface is then doped to form a conductor region including the first plate. A substantially uniform layer of a selectively etchable material, such as silicon oxide, is then grown over the grooved top planar surface. A layer of doped silicon is grown over the silicon oxide layer to define a pair of V-shaped members opposite the pair of grooves. The silicon layer is then partially etched to form a second plate connected to the silicon layer through a pair of V-shaped members. Both the second plate and the pair of V-shaped members are then suspended over the first capacitive plate by sacrificially etching a portion of the selectively etchable layer. Electronic circuitry is then coupled to both the doped silicon layer and the doped substrate to detect changes in capacitance between the first and second plates in response to an applied force, such as airflow, to be measured.
REFERENCES:
patent: 4071838 (1978-01-01), Block
patent: 4144516 (1979-03-01), Aine
patent: 4495820 (1985-01-01), Shimada et al.
patent: 4665610 (1987-05-01), Barth
patent: 4670969 (1987-06-01), Yamada
patent: 4773972 (1988-09-01), Mikkor
Mikkor Mati
Sickafus Edward N.
Abolins Peter
Ford Motor Company
Hearn Brian E.
Lippa Allan J.
Nguyen Tuan
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