Fishing – trapping – and vermin destroying
Patent
1990-05-24
1991-06-25
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 89, 437130, 437133, 437 7, 437227, 148DIG95, 156648, 156649, H01L 2100, H01L 2176
Patent
active
050266624
ABSTRACT:
A method of undercutting mesa structures in which the lateral extent of the undercut is determined by a prior fabrication stage in which channels (5, 6) are etched and then infilled with a different material. The mesa is formed over the channels (5,6) and a selective etch is used to undercut the mesa, the extent of the undercut (11) being limited by the location of the infilled channels (5, 6). For mechanical stability and insulation the undercuts (11) are filled or partly filled with dielectric (10).
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British Telecommunications public limited company
Hearn Brian E.
Nguyen Tuan
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