Method for fabricating a semiconductor laser diode

Fishing – trapping – and vermin destroying

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437126, 437130, H01L 2120

Patent

active

057078920

ABSTRACT:
A method for fabricating a semiconductor laser diode includes the steps of forming a double hetero structured semiconductor layer on a substrate, forming a dielectric layer on the double hetero structured semiconductor layer, selectively etching the dielectric layer to expose a portion of the double hetero structured semiconductor layer, selectively removing the exposed semiconductor layer using the dielectric layer as a mask by liquid phase etching, and re growing a semiconductor layer on the etched portion by liquid phase epitaxy.

REFERENCES:
patent: 4558448 (1985-12-01), de Poorter et al.
patent: 4677634 (1987-06-01), Meuleman et al.
patent: 4904617 (1990-02-01), Muschke
patent: 5413956 (1995-05-01), Watanabe et al.
patent: 5436196 (1995-07-01), Miyashita

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