Method for fabricating a ridge-shaped laser in a channel

Details Method for fabricating a ridge-shaped laser in a channel Method for fabricating a ridge-shaped laser in a channel

1995-08-16

1997-10-07

Kunemund, Robert

Fishing, trapping, and vermin destroying

437127, H01L 2120

Patent

active

056747799

ABSTRACT:
A method for manufacturing a ridge in a channel laser diode in II-VI materials by etching grooves to form an active mesa flanked by support mesas. The method involves using certain etchants for certain compositions of the II-VI layers so that the grooves can be formed by wet chemical etching using only a single photolithographic process.

REFERENCES:
patent: 5213998 (1993-05-01), Qui et al.
patent: 5363395 (1994-11-01), Gaines et al.
patent: 5366927 (1994-11-01), Schetzina
patent: 5395791 (1995-03-01), Cheng et al.
patent: 5399885 (1995-03-01), Thijs et al.
Electronics Letters, Nov. 8, 1979, vol. 15, No. 23, pp. 763-765, I. P. Kaminow, et al., "Single-Mode C.W. Ridge-Waveguide Laser Emitting at 1.55.mu.m."
Appl. Phys. Lett. 48 (2), Jan. 13, 1986, pp. 89-91. M. Ikeda et al., "Room-temperature Continuous-wave Operation of an AlbaInP Mesa Stripe Laser."

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