Method for fabricating a radiation hardened oxide having structu

Details Method for fabricating a radiation hardened oxide having structu Method for fabricating a radiation hardened oxide having structu

1985-09-09

1987-01-06

Roy, Upendra

Metal treatment

Compositions

Heat treating

29571, 29576B, 29576W, 148187, 148DIG82, 148DIG83, 357 51, 357 91, H01L 21265, H01L 2120

Patent

active

046344730

ABSTRACT:
A method for making a partially radiation hardened oxide adjacent an edge comprises forming an oxide layer on another layer with a temperature between about 975.degree. C. and 1400.degree. C., preferably between about 1000.degree. C. and 1200.degree. C. Then the structure of the oxide layer is damaged, such as by ion implantation, preferably with an inert element. Thereafter the oxide layer is annealed at a temperature between about 850.degree. C. and 900.degree. C., preferably at about 875.degree. C.

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