Method for fabricating a monolithic fluid injection device

Details Method for fabricating a monolithic fluid injection device Method for fabricating a monolithic fluid injection device

2006-08-15

2006-08-15

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S830000, C029S831000, C029S832000, C029S854000, C216S027000

Reexamination Certificate

active

07089665

ABSTRACT:
A method for fabricating a monolithic fluid injection device. The method includes providing a substrate with a patterned sacrificial layer thereon. Next, a patterned support layer and a patterned resistive layer, as a heating element, are formed on the substrate sequentially. A patterned insulating layer having a heating element contact via and a first opening is formed on the support layer. A patterned conductive layer is formed on the support layer and fills the heating element contact via as a signal transmitting circuit. A patterned protective layer having a signal transmitting circuit contact via and a second opening corresponding to the first opening is formed on the substrate. A manifold is formed by wet etching the back of the substrate to expose the sacrificial layer. A chamber is formed by removing the sacrificial layer in the wet etching process. Finally, an opening connecting the chamber is formed by etching the support layer along the second opening.

REFERENCES:
patent: 5122812 (1992-06-01), Hess et al.
patent: 5159353 (1992-10-01), Fasen et al.
patent: 5563637 (1996-10-01), Francis et al.
patent: 6102530 (2000-08-01), Kim et al.
patent: 6231153 (2001-05-01), Elgee

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