Method for fabricating a miniature tunable filter

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S830000, C029S846000, C029S852000, C333S205000, C333S207000, C333S231000, C333S232000, C333S233000

Reexamination Certificate

active

07861398

ABSTRACT:
A method for fabrication of a filter includes forming an input transformer pole in a first substrate by forming a first conductive via, forming an output transformer pole in the first substrate by forming a second conductive via, forming one or more filter poles in the first substrate between the input transformer pole and the output transformer pole by forming one or more conductive vias in the first substrate between the input transformer pole and the output transformer pole, fabricating one or more tuning elements on a second substrate, wherein the number of tuning elements corresponds to the number of filter poles between the input transformer pole and the output transformer pole, and bonding the second substrate to a top surface of the first substrate so that each tuning element on the second substrate is aligned with and overlays a filter pole on the first substrate.

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Barker, N.S., “Distributed MEMS True-Time Delay Phase Shifters and Wide-Band Switches,”IEEE Transactions on Microwave Theory and Techniques, vol. 46, No. 11, pp. 1881-1890 (Nov. 1998).

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