Method for fabricating a micro-electromechanical system switch

Details Method for fabricating a micro-electromechanical system switch Method for fabricating a micro-electromechanical system switch

2007-09-07

2009-06-16

Phan, Thiem (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S025030, C029S825000, C029S846000, C029S874000, C029S876000, C200S181000, C335S078000, C335S262000

Reexamination Certificate

active

07546677

ABSTRACT:
A method includes forming a signal line on the substrate so as to have a predetermined opening portion; at least one supporting frame each formed on the substrate at both sides of the signal line; a ground line formed on the substrate between the supporting frame and the signal line; a moving plate fixed to the supporting frame at both sides thereof, the moving plate being movable upward and downward; a switching unit positioned on the moving plate, the switching unit comprising contact means for connecting the opened signal line; and a supporting layer for supporting the moving plate and the switching unit, wherein the supporting layer comprises a support protrusion portion for maintaining a distance from the substrate.

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Mihailovich et al.; “MEM Relay for Reconfigurable RF Circuits”; IEEE Microwave and Wireless Components Letters, vol. 11, No. 2, Feb. 2001; pp. 53-55.
Hyman et al; “Surface-Micromachined RF MEMs Switches on GaAs Substrates”; CCC 1094-4290/99/040348-14; pp. 348-361.

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