Method for fabricating a junction varactor with high Q factor

Semiconductor device manufacturing: process – Voltage variable capacitance device manufacture

Reexamination Certificate

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C257SE29344, C257SE27049, C257SE21364

Reexamination Certificate

active

11760789

ABSTRACT:
A junction varactor includes a gate finger lying across an ion well of a semiconductor substrate; a gate dielectric situated between the gate finger and the ion well; a first ion diffusion region with first conductivity type located in the ion well at one side of the gate finger, the first ion diffusion region serving as an anode of the junction varactor; and a second ion diffusion region with a second conductivity type located in the ion well at the other side of the gate finger, the second ion diffusion region serving as a cathode of the junction varactor. In operation, the gate of the junction varactor is biased to a gate voltage VGthat is not equal to 0 volt.

REFERENCES:
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patent: 6576958 (2003-06-01), Ker et al.
patent: 6882029 (2005-04-01), Gau et al.
patent: 6943399 (2005-09-01), Gau
patent: 6949440 (2005-09-01), Gau
patent: 7056761 (2006-06-01), Vashchenko et al.
patent: 7259418 (2007-08-01), Kadowaki et al.
patent: 2002/0074589 (2002-06-01), Benaissa et al.
patent: 1438705 (2003-08-01), None

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