Method for fabricating a head/slider assembly integrated with a

Details Method for fabricating a head/slider assembly integrated with a Method for fabricating a head/slider assembly integrated with a

1998-09-09

2000-07-18

Hall, Carl E.

Metal working

Method of mechanical manufacture

Electrical device making

2960312, 2960315, G11B 542

Patent

active

060889071

ABSTRACT:
A head/slider assembly is integrated with a track-following electrostatic micro actuator. A method for fabricating the head/slider assembly includes the steps of: forming a micro actuator structural layer on a slider substrate with a cavity formed therebetween; forming metal signal lines on the micro actuator structure layer; forming the read/write magnetic head on a central part of the micro actuator structure layer; etching to separate the micro actuator and the read/write magnetic head; and forming a protective cover on top of the micro actuator and the read/write magnetic head to form the head/slider assembly, to thereby make the assembly to allow it to be used in a HDD system of a very high track density having a track pitch of 1 .mu.m and a recording density of more than 10 Gb/in.sup.2.

REFERENCES:
patent: 5802701 (1998-09-01), Fontana et al.

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