Method for fabricating a field emission display

Details Method for fabricating a field emission display Method for fabricating a field emission display

1995-06-07

1997-05-13

Bradley, P. Austin

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 49, 445 50, H01J 130, H01J 902

Patent

active

056286619

ABSTRACT:
A method is provided for fabricating a field emission device which can be adopted as the source for a flat panel display, an ultra-high frequency amplifier sensor, or an electron-beam-applied instrument. A polyimide layer is used as a release layer and a metal mask is formed thereon, thereby enabling the height of micro-tips to be easily controlled. Since the polyimide layer is soluble in an appropriate solvent, contamination does not occur during an etching process, thereby increasing the reliability of the device.

REFERENCES:
patent: 5209687 (1993-05-01), Konishi
patent: 5328558 (1994-07-01), Kawamura
patent: 5330606 (1994-07-01), Kubota et al.
patent: 5331199 (1994-07-01), Chu et al.
patent: 5458520 (1995-10-01), DeMercurio et al.
G.J. Campisi et al., Mat. Res. Soc. Symp. Proc., vol. 76, 1987, pp. 67-72.

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