Metal working – Method of mechanical manufacture – Electrical device making
Patent
1998-01-28
2000-09-05
Arbes, Carl J.
Metal working
Method of mechanical manufacture
Electrical device making
430156, 430167, 4302801, 29825, H01K 310
Patent
active
061124087
ABSTRACT:
A method for fabricating a chip carrier, e.g., a printed circuit board, which includes at least one photo-via is disclosed. This method inlcudes the steps of forming a first dielectric layer on a substrate. A second dielectric layer, having a greater photosensitivity than the first dielectric layer, is formed on the first dielectric layer. Preferably, this second dielectric layer has a relatively low optical absorptivity at the wavelengths to be used during exposure. Then, at least the second dielectric layer is selectively exposed to actinic radiation. The second and first dielectric layers are then developed, to form one or more desired photo-vias.
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Haze Takayuki
Yamashita Shigeaki
Arbes Carl J.
Hogg William N.
International Business Machines - Corporation
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