Method for fabricating a capacitor structure

Details Method for fabricating a capacitor structure Method for fabricating a capacitor structure

2008-09-09

2008-09-09

Wilczewski, M. (Department: 2822)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S399000, C438S740000

Reexamination Certificate

active

11308237

ABSTRACT:
A capacitor structure is described, including a substrate, a first metal layer in the substrate, an etching stop layer on the substrate having therein an opening that exposes a portion of the first metal layer, a connection layer on the portion of the first metal layer, the sidewall of the opening and a portion of the etching stop layer, a second metal layer over the connection layer, and an insulating layer between the second metal layer and the connection layer.

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