Method for fabricating a capacitor for a dynamic random access m

Details Method for fabricating a capacitor for a dynamic random access m Method for fabricating a capacitor for a dynamic random access m

1994-04-20

1995-10-10

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 60, 437919, H01L 2170, H01L 2700

Patent

active

054570638

ABSTRACT:
A method for fabricating a capacitor of a dynamic random access memory cell having increased surface area and capacitance of its storage electrode which includes a plurality of vertical protrusions is disclosed. The capacitor includes an electrode plate electrically connected to a field effect transistor formed on a semiconductor substrate through interlayer insulating layers, a plurality of protrusions formed on the electrode plate, side walls respectively formed at side edges of the electrode plate, and a dielectric film and a plate electrode sequentially formed over the entire exposed surfaces of the electrode plate, the protrusions and the side walls.

REFERENCES:
patent: 5084405 (1992-01-01), Fazan et al.
patent: 5158905 (1992-10-01), Ahn

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