Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of...
Reexamination Certificate
2005-02-15
2005-02-15
Fourson, George (Department: 2823)
Semiconductor device manufacturing: process
Forming bipolar transistor by formation or alteration of...
C438S360000
Reexamination Certificate
active
06855612
ABSTRACT:
A method for producing bipolar transistors with the aid of selective epitaxy for producing a collector and base. The method includes widening the area of the base either by the isotropic etching of the conductive layer or by the oxidation of the conductive layer and by the subsequent removal of the oxide layer. This widening of the area of the base prevents the occurrence of short-circuits between the emitter and the collector during the subsequent production of the base.
REFERENCES:
patent: 4851362 (1989-07-01), Suzuki
patent: 4892837 (1990-01-01), Kudo
patent: 4904612 (1990-02-01), Zwicknagl et al.
patent: 5001533 (1991-03-01), Yamaguchi
patent: 5008207 (1991-04-01), Blouse et al.
patent: 5101256 (1992-03-01), Harame et al.
patent: 5342797 (1994-08-01), Sapp et al.
patent: 5402002 (1995-03-01), Meister et al.
patent: 5414288 (1995-05-01), Fitch et al.
patent: 5422303 (1995-06-01), Klose et al.
patent: 5432120 (1995-07-01), Meister et al.
patent: 5627395 (1997-05-01), Witek et al.
patent: 5773350 (1998-06-01), Herbert et al.
patent: 5962879 (1999-10-01), Ryum et al.
patent: 0 418 185 (1991-03-01), None
patent: 0 600 276 (1996-05-01), None
patent: 0 724 298 (1996-11-01), None
Abstract of Japanese 07086301, Published Mar. 31, 1995,Patent Abstracts of Japan, vol. 1995, No. 06, Jul. 31, 1995.
Gregory et al, “Fully Self-Aligned Si Bipolar Transistors with Collector and Base Grown Using Silane-Only Selective Epitaxy”,Electronic Letters, vol. 32, No. 9, Apr. 25, 1996, pp. 850-851.
Müller Karl-Heinz
Wolf Konrad
Fourson George
Infineon - Technologies AG
Kebede Brook
Schiff & Hardin LLP
LandOfFree
Method for fabricating a bipolar transistor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for fabricating a bipolar transistor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for fabricating a bipolar transistor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3503099