Fishing – trapping – and vermin destroying
Patent
1986-08-06
1987-09-08
Hearn, Brian E.
Fishing, trapping, and vermin destroying
357 34, 357 59, 148DIG124, 148DIG10, 156653, 437 69, 437233, H01L 21302, H01L 21314
Patent
active
046914366
ABSTRACT:
A method for fabricating bipolar transistors comprises a step of forming a multi-layered film consisting of a polysilicon film (600), a silicon nitride film (202) and a silicon oxide film (104) on an emitter region (7) and on an external base region (54, 56), a step of causing the silicon oxide film (104) to recede inwardly from the polysilicon film (600) and silicon nitride (202) film, a step of patterning the polysilicon film (600) by using the inwardly receded oxide film (104) as a mask while defining the external base region (54, 56), a step of forming an emitter region (7) and an active base region (6) by using the patterned polysilicon as an impurity diffusion source while self-alignedly forming an external base region (54, 56), and a step of self-alignedly forming an insulation film (107, 203) for electrical isolation between base and emitter electrode interconnections (9) on the side wall of the polysilicon film (603) by means of anisotropic etching.
REFERENCES:
patent: 4318751 (1982-03-01), Horng
Hearn Brian E.
McAndrews Kevin
Mitsubishi Denki & Kabushiki Kaisha
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