Method for examining foreign matters in through holes

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Reexamination Certificate

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07043072

ABSTRACT:
Provided herein are a method and an apparatus for examining foreign matters in through holes, which can quickly conduct an examination of foreign matter in through holes with low costs and high accuracy. Light passing through a plurality of through holes having a uniform size is simultaneously taken as image data, the number of areas of the imaged masses corresponding to the plurality of the respective through holes is initially counted, and a process to determine presence or absence of foreign matters is conducted by mutually comparing areas of adjacent masses for only a work piece with a counted value of the masses being concurred with a specified value.

REFERENCES:
patent: 3620630 (1971-11-01), Hergenrother
patent: 4893346 (1990-01-01), Bishop
patent: 5384711 (1995-01-01), Kanai et al.
patent: 5583948 (1996-12-01), Shibayama
patent: 6624885 (2003-09-01), Pon et al.
patent: 408229920 (1996-09-01), None
U.S. Appl. No. 09/821,695, filed Mar. 29, 2001, Goto et al.
U.S. Appl. No. 09/821,789, filed Mar. 29, 2001, Goto et al.

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