Method for evaporating large quantities of metals and semiconduc

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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427250, 4272552, B05D 314

Patent

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043850804

ABSTRACT:
The invention relates to a method for evaporating large quantities of metals and semiconductor material by electromagnetic levitation, in which levitated evaporand is heated to evaporation by electrical means, particularly induction heating. To minimize precipitation of the evaporated material on parts of an electromagnetic coil means, these parts are heated due to proximity with coils of the coil means to evaporate liquid condensate deposits formed on the parts. The liquid condensate deposits are then returned into the evaporand by electromagnetic forces arising from the coil means, or gravitational forces or a combination of these forces. According to one embodiment of the invention, screens are placed between the electrical coil exposed to the vapor of the evaporated material and levitated evaporand. The condensate formed upon the screens is heated by induction, radiation, heat of condensation, or resistance heating or a combination to them.

REFERENCES:
Popular Mechanics Oct. 1952, vol. 98 #4, 427-447, "Metal Floats in Air . . . ", p. 86.

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