Method for evaluating wafer configuration, wafer, and wafer...

Details Method for evaluating wafer configuration, wafer, and wafer... Method for evaluating wafer configuration, wafer, and wafer...

2005-12-13

2005-12-13

Nghiem, Michael (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Dimensional determination

C438S014000

Reexamination Certificate

active

06975960

ABSTRACT:
A method for evaluating a wafer configuration includes: obtaining plural wafer configuration profiles from a central wafer portion to an edge portion along the entire periphery at a prescribed angular space; providing a first region for calculating a reference line for each profile in the central side of the wafer; calculating the reference line in the first region; providing a second region in the peripheral side of the wafer outside the first region; extrapolating the reference line calculated in the first region to the second region; analyzing a value obtained by subtracting the reference line value in the second region from an actually measured value in the second region; calculating the maximum value among the values as a surface characteristic and the minimum value among the values as a surface characteristic; and, evaluating configuration uniformity in the peripheral portion of the wafer from plural surface characteristics and surface characteristics.

REFERENCES:
patent: 4510176 (1985-04-01), Cuthbert et al.
patent: 5400548 (1995-03-01), Huber et al.
patent: 6712673 (2004-03-01), Albrecht et al.
patent: 6828163 (2004-12-01), Kobayashi et al.
patent: 6852012 (2005-02-01), Vepa et al.
patent: 6861360 (2005-03-01), Wenski et al.
patent: 2000-260840 (2000-09-01), None
patent: 2001-185537 (2001-07-01), None
International Search Report for PCT/JP02/09096 mailed on Jan. 14, 2003.

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