Method for evaluating the effect of a barrier layer on electromi

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324716, 324719, G01R 2726

Patent

active

056126271

ABSTRACT:
A substantially constant current is conducted in a first direction through an interconnect structure having a barrier layer to determine the lifetime of the structure in the first current direction. A substantially identical current is conducted in a second direction through a substantially identical interconnect structure to determine the lifetime of the structure in the second current direction. These tests are repeated for identical structures but having different barrier layer thicknesses. The results of these lifetime tests are compared to determine the barrier layer's effect on electromigration in the structure, which can be used to design the barrier layer to optimize the structure's lifetime and speed.

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patent: 4483629 (1984-11-01), Schwarz et al.
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patent: 4970574 (1990-11-01), Tsunenari
patent: 5291142 (1994-03-01), Ohmi
patent: 5420513 (1995-05-01), Kimura

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