Method for evaluating semiconductor device

Details Method for evaluating semiconductor device Method for evaluating semiconductor device

2007-06-12

2007-06-12

Bui, Bryan (Department: 2863)

Data processing: measuring, calibrating, or testing

Testing system

Of circuit

C702S182000

Reexamination Certificate

active

11132434

ABSTRACT:
The present invention provides a method for evaluating an intended element or a parameter. In addition, the invention provides an evaluation method for obtaining a more precise result rapidly. According to the invention, a plurality of evaluation circuits are formed over the same substrate, and while simultaneously operating the plurality of evaluation circuits, an output of one evaluation circuit selected by a selection circuit that is formed over the substrate is arbitrarily evaluated.

REFERENCES:
patent: 4163957 (1979-08-01), Knauer et al.
patent: 4242654 (1980-12-01), Knauer
patent: 5-297077 (1993-11-01), None

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