Method for evaluating performance of aluminum alloy wiring film

Details Method for evaluating performance of aluminum alloy wiring film Method for evaluating performance of aluminum alloy wiring film

1992-04-21

1994-04-05

Noland, Tom

Measuring and testing

Hardness

73866, G01N 340, G01N 3320

Patent

active

052994503

ABSTRACT:
A method for evaluating performance of an aluminum alloy wiring film includes the steps of forming a first aluminum alloy film on a substrate, forming a second aluminum alloy film on another substrate, measuring hardness of the both films, and evaluating the superiority of stressmigration of the aluminum alloy films by comparison between the films in hardness.

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Ind. Lab. (USA) vol. 45, No. 10, pp. 1184-1185 (Oct. 1979) pub. Apr. 1980 "Measurement of the Microhardness of Polymer Materials"; A. I. Barkan et al.
RCA Technical Notes: TN No. 1368: Mailed Jun. 25, 1985 "Device for Testing Brittle Coating on a Wire"; S. W. Haun; 2 pages.

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