Method for evaluating particle concentrations in a clean...

Details Method for evaluating particle concentrations in a clean... Method for evaluating particle concentrations in a clean...

2005-09-13

2005-09-13

Williams, Hezron (Department: 2856)

Measuring and testing

Gas analysis

Solid content of gas

C073S028010, C073S863220, C073S865500, C073S864710

Reexamination Certificate

active

06941795

ABSTRACT:
A method for evaluating particle concentrations in the atmosphere of a clean room or of a machine mini-environment is described. The method includes exposing a test surface of a test substrate to the atmosphere for a test time, capturing an amount of particles at the test surface of the substrate at the end of the test time, analyzing the amount of captured particles, and comparing the analyzed amount of particles with a reference amount of particles from a reference substrate. An evaluation of the atmosphere of the room or environment can thus be accomplished in a relatively short time.

REFERENCES:
patent: 3498110 (1970-03-01), Hans
patent: 3526461 (1970-09-01), Lindahal et al.
patent: 4725294 (1988-02-01), Berger
patent: 5804494 (1998-09-01), Mitani et al.
patent: 6360590 (2002-03-01), Brown

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