Method for evaluating interferograms and interferometer therefor

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356360, G01B 902

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active

053573412

ABSTRACT:
The invention relates to an evaluation method for interferograms and an interferometer corresponding thereto with which tile influence of coherent noise is reduced with simultaneously high interference contrast. Several phase maps are computed from interferograms which are recorded with coherent light. The interferogram components of the test object and the interferogram components of the coherent noise are displaced relative to each other in the camera plane between recording the interferograms. The influence of the coherent noise is suppressed by subsequently averaging the phase maps.

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patent: 5020901 (1991-06-01), DeGroot
patent: 5112129 (1992-05-01), Davidson et al.
patent: 5210591 (1993-05-01), De Groot
"Absolute Measurement of Flat Mirrors in the Ritchey-Common Test" by F. M. Kuchel, Workshop on Optical Fabrication and Testing, Oct. 1986.

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