Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2005-02-22
2005-02-22
Le, Dung A. (Department: 2818)
Semiconductor device manufacturing: process
With measuring or testing
C438S149000, C438S151000, C438S152000, C324S456000, C324S551000
Reexamination Certificate
active
06858448
ABSTRACT:
A semiconductor device evaluation method includes the steps of measuring a total injected electron quantity before an insulating film causes a dielectric breakdown and obtaining the ratio between the total injected electron quantity and a total injected electron quantity before retention degradation is caused. In this method, using the ratio and the total injected electron quantity, the total injected electron quantity before the retention degradation is caused is calculated.
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Fumitaka Arai et al., “Extended Data Retention Process Technology for Highly Reliable Flash EEPROMs of 106to 107W/E CYCLES”, IEEE 98CH36173, pp. 378-382, 36thAnnual International Reliability Physics Symposium, Reno, Nevada, 1998.
Le Dung A.
McDermott Will & Emery LLP
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