Method for etching thin nickel iron film to make a magnetic reco

Details Method for etching thin nickel iron film to make a magnetic reco Method for etching thin nickel iron film to make a magnetic reco

1997-06-23

2000-07-25

Koslow, C. Melissa

Etching a substrate: processes

Forming or treating article containing magnetically...

216100, 216108, 2960301, H05K 306

Patent

active

06093333&

ABSTRACT:
In the formation of a magnetic recording head or other electronic device on a substrate, at least one thin nickel iron-film is deposited on the substrate and an element is formed by etching the film. The film is first activated by disposing the film in a hydrochloric acid activating solution containing a ferrous salt. After activation, the film is removed from the activating solution and the hydrochloric acid rinsed away from the substrate. Then, the film is etched by disposing it in a sulfuric acid bath containing a ferric salt. After etching, the film is rinsed with sulfuric acid. The process substantially avoids residual corrosion of the resulting head that otherwise would be caused by chloride lingering in the etched portions of the head.

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"Active-State Dissolution of 50N and 79NM Iron-Nickel Alloys in Phosphoric Acid Solutions", Trepak, N.M., Il'ina, L..K., and L'vov, A..L., N.G. Chernyshevskii Saratov State University, translated from Elektrokhimiya, vol. 20, No. 4, pp. 526-529, Apr. 1984.
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Hungarian Patent Description 174 472, Pinter, Istvan, Nov. 5, 1995.

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