Method for etching superconductor materials

Details Method for etching superconductor materials Method for etching superconductor materials

1988-12-15

1991-02-26

Simmons, David A.

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505728, 252 792, 252 794, 156664, 156667, C09K 1306

Patent

active

049961918

ABSTRACT:
An etchant containing 1-hydroxy-ethane-1,1-diphosphonic acid is useful in etching Ba--Cu--O and Ca--Cu--O high-temperature superconductors.

REFERENCES:
patent: 4626328 (1986-12-01), Mohr
Tonouchi et al., "Chemical Etching of High-T.sub.c . . . ", Jap. J. Appl. Phys., vol. 27, No. 1, Jan. 1988, pp. L98-L100.

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