Etching a substrate: processes – Forming or treating article containing a liquid crystal...
Reexamination Certificate
2005-06-30
2008-09-16
Ahmed, Shamim (Department: 1792)
Etching a substrate: processes
Forming or treating article containing a liquid crystal...
C216S002000, C216S041000, C430S318000
Reexamination Certificate
active
07425276
ABSTRACT:
The present invention provides for a method for the fabrication of microchannels, and more particularly to the fabrication of microchannels for use in Microelectromechanical (MEMS) devices and MEMS related devices. In accordance with an embodiment of the present invention, microchannels are formed by a microfabrication method utilizing electronic imaging techniques in combination with chemical etching and subsequent metallization. The method of the present invention is effective in producing networks of channels in liquid crystal polymer (LCP) polymeric substrates which are highly defined in terms of their patterns, and thus are able to encompass a wide variety of end uses.
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Broadbent Heather
Fries David P.
Steimle George
Ahmed Shamim
Hopen Anton J.
Sauter Molly L.
Smith & Hopen , P.A.
University of South Florida
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