Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1988-08-31
1990-02-06
Pianalto, Bernard
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 531, 427 541, B05D 306
Patent
active
048987484
ABSTRACT:
A method for enhancing a chemical reaction is provided by forming a plasma that includes at least one multiatomic reactant, flowing the plasma into a reaction zone, and then elevating an electron temperature of the plasma by at least about 1,000.degree. Kelvin. The elevated electron temperature increases the dissociation of the multiatomic reactant in the plasma and/or inhibits recombination of the multiatomic reactant when dissociated. The method may be practiced to enhance the chemical vapor deposition of materials such as silicon and diamond.
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Pianalto Bernard
The Board of Trustees of Leland Stanford Junior University
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