Coherent light generators – Particular beam control device – Control of pulse characteristics
Reexamination Certificate
2005-07-05
2005-07-05
Harvey, Mingun Oh (Department: 2828)
Coherent light generators
Particular beam control device
Control of pulse characteristics
C372S030000, C372S055000, C372S057000, C315S291000
Reexamination Certificate
active
06914920
ABSTRACT:
The invention is directed to a method for the energy stabilization of a gas discharge-pumped radiation source that is operated in defined pulse sequences, particularly for suppression of overshooting and undershooting of excimer lasers and EUV radiation sources in burst operation. It is the object of the invention to find a novel possibility for the stabilization of the energy emission of a gas discharge-pumped radiation source that is operated in defined pulse sequences (bursts) which makes it possible to take into account a temporary behavior of the radiation source at the beginning of every burst without repeated recalibration of the energy-voltage curve. In a method with proportional regulation of the charging voltage as a function of the measured pulse energy, the object stated above is met according to the invention in that the pulse energy En(p)to be adjusted for a current pulse in the current burst is calculated from the pulse energy of the preceding pulse in the current burst and an identical pulse En(p-1)of a preceding precursor burst, wherein the precursor burst is an unregulated model burst and the high voltage which is to be adjusted currently for the current pulse is calculated from the current pulse energy En(p)by dividing by the rise dE/dU of the function of the pulse energy depending on the charging voltage in the linear operating range of the radiation source.
REFERENCES:
patent: 5710787 (1998-01-01), Amada et al.
patent: 6005879 (1999-12-01), Sandstrom et al.
patent: 6067306 (2000-05-01), Sandstrom et al.
patent: 0 854 003 (1998-07-01), None
patent: 0 873 812 (1998-10-01), None
patent: WO 01/28048 (2001-04-01), None
Harvey Mingun Oh
Reed Smith LLP
Rodriguez Armando
Xtreme technologies GmbH
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