Radiation imagery chemistry: process – composition – or product th – Transfer procedure between image and image layer – image... – Diffusion transfer process – element – or identified image...
Reexamination Certificate
2007-01-09
2007-01-09
Hamilton, Cynthia (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Transfer procedure between image and image layer, image...
Diffusion transfer process, element, or identified image...
C430S203000, C430S271100, C430S273100
Reexamination Certificate
active
10334219
ABSTRACT:
The present invention provides methods for forming images in positive- or negative-tone chemically amplified photoresists. The methods of the present invention rely on the vertical up-diffusion of photoacid generated by patternwise imaging of an underlayer disposed on a substrate and overcoated with a polymer containing acid labile functionality. In accordance with the present invention, the vertical up-diffusion can be the sole mechanism for imaging formation or the methods of the present invention can be used in conjunction with conventional imaging processes.
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Larson Carl Eric
Wallraff Gregory Michael
Hamilton Cynthia
International Business Machines - Corporation
Johnson Daniel E.
Scully Scott Murphy & Presser
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