Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Patent
1986-02-27
1987-08-11
Richman, Barry S.
Cleaning and liquid contact with solids
Processes
With work or work parts movable during treatment
134 34, 427273, 427335, B08B 700
Patent
active
046859756
ABSTRACT:
Method for cleaning material from the outer edge of an object by applying a solvent for the material to a flat surface adjacent the edge and moving the solvent onto the edge by centrifugal force.
REFERENCES:
patent: 4027686 (1977-06-01), Shortes et al.
patent: 4113492 (1978-09-01), Sato et al.
patent: 4161356 (1979-07-01), Giffin et al.
IBM Technical Disclosure Bulletin, vol. 13, No. 9, Feb. 1971, p. 2693, "Elimination of Photoresist Bead From Substrate Periphery".
IBM Technical Disclosure Bulletin, vol. 18, No. 6, Nov. 1975, p. 1769, "Wafer Back Side Periphery for Simultaneous Processing".
IBM Technical Disclosure Bulletin, vol. 19, No. 6, Nov. 1976, pp. 2114-2115, "Remover for Peripheral Resist Build-Ups".
Kottman Rickie A.
Terrill Robert E.
Wise Ann E.
Bachand Richard A.
Merrett N. Rhys
Richman Barry S.
Sharp Melvin
Texas Instruments Incorporated
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