Chemistry: electrical and wave energy – Processes and products – Electrical – or wave energy in magnetic field
Patent
1991-03-20
1993-08-17
Chin, Peter
Chemistry: electrical and wave energy
Processes and products
Electrical, or wave energy in magnetic field
20415741, 20415743, 20415744, 204164, 417 49, 4174234, C25B 102
Patent
active
052365620
ABSTRACT:
A method and apparatus for discharging hydrogen from a vacuum vessel using a roughing vacuum pump and a turbo-molecular pump. During discharge of hydrogen from the vacuum vessel, a material which has excellent reactivity with hydrogen, such as a material which has been excited or ionized by microwave or laser radiation, is introduced into the exhaust system. The material reacts with hydrogen to convert hydrogen into another substance of large molecular weight, whereby the evacuating performance of the vacuum exhaust system is improved with respect to discharging of hydrogen.
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Patent Abstract of Japan, vol. 9, No. 164 (M-395) [1887], Jul. 10, 1985 p. 3M 395; and JP-A-60 36 791 (Kogyo Gijutsuin) Feb. 2, 1985.
Okano Haruo
Okumura Katsuya
Shibata Akio
Tsujimura Manabu
Chin Peter
Ebara Corporation
Kabushiki Kaisha Toshiba
Nguyen Dean Tan
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