Method for diffusion of aluminium

Details Method for diffusion of aluminium Method for diffusion of aluminium

1975-07-14

1977-07-26

Ozaki, G.

Metal treatment

Process of modifying or maintaining internal physical...

Chemical-heat removing or burning of metal

148186, 148190, 427 85, H01L 21225

Patent

active

040381110

ABSTRACT:
The invention relates to a method for diffusing aluminium into a substrate by painting. According to this method, aluminium isopropylate is dissolved in ethoxyethanol at the maximum solubility. This solution is uniformly coated onto a substrate and a diffusion is carried out by placing this coated substrate into an open furnace. This invention is for manufacturing high voltage semiconductor devices.

REFERENCES:
patent: 3354005 (1967-11-01), Lepiane et al.
patent: 3615943 (1971-10-01), Genser
patent: 3630793 (1971-12-01), Christensen et al.
patent: 3660156 (1972-05-01), Schmidt
patent: 3697334 (1972-10-01), Yamamoto et al.
patent: 3789023 (1974-01-01), Ritchie
patent: 3928095 (1975-12-01), Harigaya

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