Method for diffusing an n type impurity from a solid phase sourc

Details Method for diffusing an n type impurity from a solid phase sourc Method for diffusing an n type impurity from a solid phase sourc

1991-11-27

1993-01-26

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437959, 437987, 148DIG160, H01L 21225

Patent

active

051822296

ABSTRACT:
A method for diffusing n type impurities from a solid phase source into a III-V compound semiconductor includes depositing an amorphous or polycrystalline selenium or sulfur film on the III-V compound semiconductor and diffusing selenium or sulfur from the film into the compound semiconductor by annealing. Highly controllable diffusion of n type impurities in a high concentration is achieved.

REFERENCES:
patent: 4344980 (1982-08-01), Yoder
patent: 4350541 (1982-09-01), Mizushima et al.
patent: 4830983 (1989-05-01), Thornton
patent: 5013684 (1991-05-01), Epler et al.
patent: 5051786 (1991-09-01), Nicollian et al.
"Semiconductor Laser With Controllably Disordered Superlattice Includes Selenium-Doped Semiconductor Laser In Predetermined Pattern", Discrete Devices, 8923 p. 33, U12.

Affiliated with

Also associated with

Rating

Method for diffusing an n type impurity from a solid phase sourc does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for diffusing an n type impurity from a solid phase sourc, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for diffusing an n type impurity from a solid phase sourc will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1412482