Method for diagnosing failure of a manufacturing apparatus...

Details Method for diagnosing failure of a manufacturing apparatus... Method for diagnosing failure of a manufacturing apparatus...

2005-06-21

2005-06-21

Hoff, Marc S. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C438S006000

Reexamination Certificate

active

06909993

ABSTRACT:
A method for diagnosing failure of a manufacturing apparatus, includes: measuring time series data of characteristics of a reference apparatus which conducts same processes as the manufacturing apparatus, and recording the time series data of the characteristics in a system information storage unit as a system information database; reading out a recipe listed in a process control information database recorded in a process control information storage unit; driving and controlling the manufacturing apparatus, measuring time series data of the characteristics as test data, and outputting the test data in real time, in accordance with the recipe; performing calculations on the test data, and creating failure diagnosis data; and diagnosing the failure of the manufacturing apparatus using the failure diagnosis data and the system information database.

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