Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1974-09-16
1976-06-01
Bowers, Jr., Charles L.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
96 35, 96 36, 96 49, 96 91D, 427335, 156 13, 156 17, B05D 306, G03F 102
Patent
active
039611000
ABSTRACT:
The effective sensitivity of a photo- or electron beam resist is improved by contacting the resist film with developer solution and water prior to exposure.
REFERENCES:
patent: 2911299 (1959-11-01), Baril et al.
patent: 3264104 (1966-08-01), Reichel
patent: 3639185 (1972-02-01), Colom
patent: 3649393 (1972-03-01), Hatzakis
patent: 3707373 (1972-12-01), Martinson et al.
patent: 3779774 (1973-12-01), Cope et al.
patent: 3841874 (1974-10-01), Nishino
patent: 3850633 (1974-12-01), Ross et al.
patent: 3850733 (1974-11-01), Morau et al.
Cortellino et al., "IBM Technical Disclosure Bulletin," vol. 15, No. 1, 6/1972, p. 174.
Harris David Isaac
Johnston Loren Bainum
Bowers Jr. Charles L.
Bruestle Glenn H.
Morris Birgit E.
RCA Corporation
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