Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Patent
1992-12-16
1994-04-05
Bell, Mark L.
Coating processes
Measuring, testing, or indicating
Thickness or uniformity of thickness determined
4272481, 427249, C23C 1600, C23C 1626
Patent
active
053003136
ABSTRACT:
The thickness of a layer of material deposited by chemical vapor deposition, especially a diamond layer, is monitored by providing at least one substrate on which the material is deposited, with at least one perforation of a predetermined size therein. The relationship between the thickness of the layer formed in said perforation and the thickness of the layer formed on the substrate surface is determined, so that the thickness of the surface layer can be determined from the thickness of the layer formed in the perforation.
REFERENCES:
patent: 2726173 (1955-12-01), Martin
patent: 4427711 (1984-01-01), Martin
patent: 4466872 (1984-08-01), Einbinder
patent: 5131752 (1992-07-01), Yu et al.
patent: 5204144 (1993-04-01), Cann et al.
Anthony Thomas R.
Fleischer James F.
Woodruff David W.
Bell Mark L.
General Electric Company
Pittman William H.
Sample David R.
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