Method for determining the surface quality of a substrate...

Details Method for determining the surface quality of a substrate... Method for determining the surface quality of a substrate...

2008-09-02

2011-10-25

Ton, Tri T (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100

Reexamination Certificate

active

08045147

ABSTRACT:
A method for determining the surface quality of a substrate passing from an initial state into a converted state during a conversion process including the steps of acquiring first information relating to surface defects detected on the initial substrate, acquiring second information relating to surface defects detected on the converted substrate, of processing the first information and the second information, and of classifying the converted substrate as a function of the first acquired information relating to the surface defects detected on the initial substrate and as a function of the second acquired information relating to the surface defects detected on the converted substrate.

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European Search Report dated Feb. 14, 2008, issued in corresponding European Application No. 07018586.3-2304.
Japanese Office Action dated Nov. 1, 2010 in corresponding Japanese Patent Application No. JP2008-242420 (Japanese language).

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