Method for determining the refractive index during...

Optics: measuring and testing – By light interference – For refractive indexing

Reexamination Certificate

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C356S486000

Reexamination Certificate

active

10564449

ABSTRACT:
The aim of the invention is to determine the refractive index and/or compensation of the influence of the refractive index during interferometric length measurement with the aid of an interferometer (13, 13′) impinged upon by at least two measuring beams (v2, v3) having at least defined frequencies with an approximately harmonic ratio. Interferometric phases are evaluated for the at least two measuring beams (v2, v3) at the outlet of said interferometer. The interferometric phases corresponding to the harmonic ratio of the frequencies of the measuring beams (v2, v3) are multiplicated and at least one phase difference of the thus formed phase value is examined. According to the invention, at least one of the measuring beams (v3) can be modified in the frequency thereof and a control signal which is used to modify the frequency of the measuring beam (v3) which can be modified in the frequency thereof is formed from the obtained phase difference and the measuring signal controls the frequency in such a manner that the phase difference in zero. It is also possible to determine the refractive index or the length measurement by measuring a frequency difference.

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G. Bonsch et al., “Measurement of the Refractive Index of Air and Comparison with Modified Edlen's Formulae”; Metrologia, 1998 vol. 35, pp. 133-139.
B. Boermann et al., “Improved Second Harmonic Two Wavelength Interferometer with Refractive Index Correction without Effect Modulation”; Proc. of SPIE, vol. 5190, 2003; pp. 339-346.

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