Method for determining the position of the edge bead removal...

Details Method for determining the position of the edge bead removal... Method for determining the position of the edge bead removal...

2011-07-05

2011-07-05

Chowdhury, Tari (Department: 2886)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S614000, C356S620000, C382S151000

Reexamination Certificate

active

07973931

ABSTRACT:
A method for determining the position of an edge bead removal line of a disk-like object having an edge area and an alignment mark on the edge area is disclosed, wherein the edge area including the edge bead removal line is imaged on a line-by-line basis, an intensity profile I of the imaged edge area including the edge bead removal line is obtained with a camera on a line-by-line basis, and the edge area and the alignment mark are detected, wherein the local intensity maxima I′maxof the intensity profile I are plotted as points in a diagram, segment sets are formed in the diagram, the segment sets are fitted in ellipses, and a quality criterion qgesis determined for each ellipse.

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Ingrid Peterson et al.: “Lithography Defects: Reducing and Managing Yield Killers through Photo Cell Monitoring”, Spring 2000, Yield Management Solutions.

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