Method for determining the phase of phase transformable light sc

Details Method for determining the phase of phase transformable light sc Method for determining the phase of phase transformable light sc

1983-06-30

1985-07-02

Arnold, Bruce Y.

Optics: measuring and testing

By particle light scattering

With photocell detection

356237, G01N 2101

Patent

active

045264686

ABSTRACT:
A method of determining the crystalline or structural quality of phase transformable material such as silicon uses light scattering. The material is exposed to a beam of light of a selected wavelength. Scattered light having an intensity above a threshold is detected to provide a signal which is used to control the intensity of a display beam of a visual display device. The threshold is varied to thereby vary the display beam intensity so as to provide the minimum intensity of display beam which yields a full display. The value of the thusly adjusted threshold intensity is used as a direct measure of the structural quality of the material.
The light scattering process is used to determine the phase of deposited material.
A layer of silicon material annealed from as-deposited amorphous phase material is easily and quickly distinguished from material as-deposited crystalline phase material and subsequently annealed.

REFERENCES:
patent: 4314763 (1982-02-01), Steigmeier et al.
patent: 4352016 (1982-09-01), Duffy et al.
patent: 4352017 (1982-09-01), Duffy et al.
patent: 4391524 (1983-07-01), Steigmeier et al.
"Light Scattering with Laser Sources," RCA Engineer, 15, 82(1970)--Dr. G. Harbeke/Dr. E. F. Steigmeier, (pp. 82-85).

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