Method for determining the location of a droplet on a component

Details Method for determining the location of a droplet on a component Method for determining the location of a droplet on a component

2005-01-04

2005-01-04

Kielin, Erik J. (Department: 2813)

Semiconductor device manufacturing: process

With measuring or testing

Reexamination Certificate

active

06838295

ABSTRACT:
Method for determining the location of a droplet of liquid placed on a surface of a semiconductor wafer. In one embodiment the method includes establishing first and second reference axes that intersect at a point and superimposing the point over the droplet on the semiconductor wafer surface. A first reference coordinate indicative of the position of the point along the first axis and a second reference coordinate indicative of the position of the point along the second axis are generated.

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