Method for determining the integrity of passivant coverage over

Details Method for determining the integrity of passivant coverage over Method for determining the integrity of passivant coverage over

1982-11-03

1985-05-28

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158F, G01R 3121, G01R 3102

Patent

active

045203121

ABSTRACT:
A semiconductor device having a rectifying junction after passivation is exposed to a humid ambient while being tested for humidity-induced leakage currents indicative of passivant defects such as pinholes, cracks, etc. The amplitude of the reverse biased humidity-induced current is indicative of the integrity of the passivant coverage.

REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.
patent: 3949295 (1976-04-01), Moorshead
patent: 4344985 (1982-08-01), Goodman et al.
"New Technologies Advance Power Semiconductor State-Of-The-Art" by R. Denning and J. White, RCA Technical Communications, 1979, pp. 66-72.
"Handbook of Thin Film Technology" edited by Leon I. Maissel and Reinhard Glang, 1970, pp. 11-42 through 11-47.

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